The Studies of Moisture Effects on the Silane Ignition Mechanisms
碩士 === 國立高雄第一科技大學 === 環境與安全衛生工程研究所 === 99 === Silane is a specialty gas commonly used in the semiconductor, TFT-LCD, and photovoltaic industries. It is also a pyrophoric gas which normally ignites upon in contact with air, but the ignition behavior of pure silane release into air has been known to b...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77503320876093384113 |