A Study on Active Control of a Pneumatic Vibration solation System used in Nano-precision Equipment
碩士 === 國立高雄第一科技大學 === 系統資訊與控制研究所 === 99 === This thesis focuses on the research and design of the active control law for the pneumatic vibration isolation system in nanoscale precision equipment in order to effectively enhance the vibration isolation performance from the floor, and also inhibit the...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68547716207323861217 |