Applications of CMOS MEMS Process Integration
碩士 === 國立彰化師範大學 === 機電工程學系 === 99 === Abstract The most favorite advantages of Complementary Metal-Oxide- Semiconductor (CMOS) are based on its standard material and fabrication and therefore it will make semiconductor manufacturers low costs and high-rate production. Nevertheless MEMS of CMOS fabri...
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| Format: | Others |
| Language: | zh-TW |
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2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/21382880135893151049 |