The Study for boron and phosphorus doped microcrystalline silicon using electron cyclotron resonance chemical vapor deposition
碩士 === 國立中央大學 === 光電科學研究所 === 99 === This paper is focused on growing p and n-doped thin-film silicon solar cells by electron cyclotron resonance chemical vapor deposition electron cyclotron resonance-chemical vapor deposition (ECR-CVD). The characteristics of doped layers and growing conditions ar...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89415164231025337457 |