Development of Elasticity Abrasive and it Application to Experimental Study on the mainly of Wafer by Abrasive Jet Technology
博士 === 國立中央大學 === 機械工程研究所 === 99 === As the semiconductor industry due to increased demand for technology products and petrochemical crisis caused by the solar industry is flourishing under the influence of such environment, making use of the silicon wafer significant increase in the supply and dema...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/33997396246223526892 |