Stress and crystallization of hydrogenated amorphous silicon films grown by electron cyclotron resonance chemical vapor deposition
碩士 === 國立中央大學 === 材料科學與工程研究所 === 99 === Due to its high mobility and high stability under light soaking, polycrystalline silicon (Poly-Si) is a promising material candidate for thin film solar cells and transistors. Solid phase crystallization (SPC) of hydrogenated amorphous silicon (a-Si:H) is a si...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/41859909614678173957 |