Ammonia sensitivity enhancement of poly-si nanowire by surface treatment with functionalization
碩士 === 國立交通大學 === 顯示科技研究所 === 99 === In this thesis,we use the poly-silicon nanowire field effect transistor (poly-Si NW FET) as ammonia gas sensor. However, the poly-silicon nanowire field effect transistor is limited at low NH3 concentration. In order to solve this issues, modifying the surface of...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42602184923841010006 |