High Efficiency Single-Junction Hydrogenated Amorphous Silicon Thin-Film Solar Cells
碩士 === 國立交通大學 === 光電工程學系 === 99 === In the thesis, device quality hydrogenated amorphous silicon thin film was deposited by plasma enhanced chemical vapor deposition (PECVD) with hydrogen diluted silane. This high quality intrinsic hydrogenated amorphous silicon film was served as the absorber layer...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | en_US |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/05428604144234725853 |