The trap analysis and establishment of electron transport model for SONOS memory with embedded silicon nanocrystals in nitride

碩士 === 國立交通大學 === 電子物理系所 === 99 === We analyze the trap states and establish the electron transport model for SONOS memories with embedded Si-NCs in Si3N4. Initially, the distributions of Si-SiO2 interface state density (Dit) under different growth conditions are obtained by capacitance-voltage (C-V...

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Bibliographic Details
Main Authors: Ho, Chi-Ying, 何紀瑩
Other Authors: Chen, Jenn-Fang
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/92585393274739196468