Key Process Development in Nano-scale MOSFETs Manufacturing
博士 === 國立交通大學 === 電子研究所 === 99 === The semiconductor VLSI technology is so successful that the transistor feature size and cost have been reduced exponentially with time since 1970s. Meanwhile, the transistor performance has increased constantly in the past decades and is expected to improve in the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46138360454412962833 |