Room-Temperature Nanoimprint Directly Patterning Technology Development, and Electrical and Reliability Characterization of Low Dielectric Constant Material
碩士 === 國立暨南國際大學 === 電機工程學系 === 100 === This study consists of two parts. The first part is to evaluate the room temperature nanoimprint on the low dielectric material. We used a solvent-vapor-assisted imprint method in a low dielectric material to achieve the room temperature nanoimprint by adjustin...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/38422893548873843829 |