Preparation, Characterizations and Applications of Highly C-axis Aluminum Boron Nitride Thin Films
博士 === 國立成功大學 === 材料科學及工程學系碩博士班 === 99 === Boron-aluminum nitride BxAl1-xNy(0.001≦x≦0.07, 0.85≦y≦1.0 5)films having wurtzite type structure are proposed. The material has higher hardness, higher sound velocity and wider band gap than hexagonal aluminum nitride. This study relates to a co-sputtered c...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77396705085058354578 |