Deposition and Characteristics of TiN, TiNxOy, and N-doped TiO2 Thin Films by Sputtering Using Air as a Reactive Gas
博士 === 國立中興大學 === 材料科學與工程學系所 === 99 === This study focuses on the preparation and characterization of TiN, TiNxOy, and N-doped TiO2 thin films by reactive sputtering using air as a reactive gas. The films exhibiting many superior physical and chemical properties are of technologically important mate...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/90543980118747531501 |