The Study of Atomic Layer Deposition Aluminum Oxide Passivation Effect on Crystalline Silicon Wafer
碩士 === 國立中興大學 === 光電工程研究所 === 99 === Reduction of silicon substrate thickness can not only reduce material cost, but also improve the conversion efficiency of solar cells. Currently, silicon wafer thickness has been reduced to less than 200μm, however, thinner wafers require lower temperature proc...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/9d535b |