Electroless Deposition of Barrier and Seed Layersof Through Silicon Via

碩士 === 國立中興大學 === 化學工程學系所 === 99 ===   The development of science is constantly progressing. The densification of electronic components continuously increases. In order to meet this general demand, many new three-dimensional (3D) electronic packaging technologies are now emerging, especially with th...

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Bibliographic Details
Main Authors: Chia-Pei Chou, 周嘉珮
Other Authors: Wei-Ping Dow
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/00998999624929322458