Resistive Switching Characteristics of Titanium Oxynitride Thin Films
碩士 === 明志科技大學 === 材料工程研究所 === 100 === In this study, TiOxNy thin-film were prepared under different conditions by DC magnetron sputtering. UV-VIS was applied to transmittance of 80 percentage of TiOxNy thin film. The X-ray photoelectron spectroscopy proved the valence variation of Ti, accompanied by...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/98658243272009246908 |