Investigation of the Ionic Conductivity of ZrO2-Based Nano-Films Grown by Pulsed-DC Sputtering
碩士 === 明志科技大學 === 材料工程研究所 === 101 === The microstructure and ionic conductivity of reactively sputtered yttria-stabilized zirconia (YSZ) films in various sputtering modes are systematically studied using a closed-loop controlled system with plasma emission monitoring. A transition-mode sputtering co...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2012
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| Online Access: | http://ndltd.ncl.edu.tw/handle/16589365374557307998 |