Study on the Processing and Characterizations of TiBN/DLC coatings by Unbalanced Magnetron Sputtering

Study on the Processing and Characterizations of TiBN/DLC coatings by Unbalanced Magnetron Sputtering

碩士 === 明道大學 === 材料科學與工程學系碩士班 === 99 === This study focus on the processing and characterizations of TiBN/DLC multilayer coatings by unbalanced magnetron sputtering, including the microstructure, mechanical property and practical application. Three different types of processing are studied such as Ti...

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Bibliographic Details
Main Authors: Ching-Hui Hsieh, 謝景揮
Other Authors: Wei-Yo Ho
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/09337591567580742586

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