Study on the Processing and Characterizations of TiBN/DLC coatings by Unbalanced Magnetron Sputtering
碩士 === 明道大學 === 材料科學與工程學系碩士班 === 99 === This study focus on the processing and characterizations of TiBN/DLC multilayer coatings by unbalanced magnetron sputtering, including the microstructure, mechanical property and practical application. Three different types of processing are studied such as Ti...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/09337591567580742586 |