Study on the Processing and Characterizations of TiBN/DLC coatings by Unbalanced Magnetron Sputtering

• Main Authors: Ching-Hui Hsieh, 謝景揮
• Other Authors: Wei-Yo Ho
• Format: Others
• Language: zh-TW
• Published: 2011
• Online Access: http://ndltd.ncl.edu.tw/handle/09337591567580742586

碩士 === 明道大學 === 材料科學與工程學系碩士班 === 99 === This study focus on the processing and characterizations of TiBN/DLC multilayer coatings by unbalanced magnetron sputtering, including the microstructure, mechanical property and practical application. Three different types of processing are studied such as TiB2、TiBN、TiBN+N2 Plasma films in order to analyze their differences. The films were prepared by Ti33B67 and Ti targets with gas of Ar, N2, C2H2. All films were designed with interlayer to increased adhesion by progressive deposition of graded layers. The detail structures of these coating are consisted of the same Ti interface, and final TiB2, TiBN, TiBN+N2 plasma, TiBN/DLC films. The microstructure and phase composition of coatings were studied by means of X-ray diffraction, scanning electron microscope and energy dispersive spectroscopy. The chemical bonding and surface roughness were evaluated by electron spectroscopy for chemical analysis, atomic force microscope. In field of mechanical property, the adhesion and hardness are tested by rockwell hardness tester, Nano-indenter tester. Wear test against glass balls is conducted to simulate practical application. The corrosion behaviors were studied in aerated 3.5wt.% NaCl aqueous solutions by interpretation of electrochemical anodic polarization curves. The XRD results show all samples were amorphous. The hardness was decreased with the increase of nitrogen. The wear test of TiBN/DLC films against both the pin-on-disk glass balls and WC balls as the counter-face shows very low friction coefficient.