Applying Case-Based Reasoning for Troubleshooting Diagnosis Support System of Semiconductor Exposure Equipment
碩士 === 國立高雄應用科技大學 === 電子工程系 === 99 === With competition is intense in semiconductor industry, time is money. Every manufacture line must to operate 24 hours every day, to reach the target of high throughput and good yield. Relative, for maintain the equipment of product work in normally, and reduce...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/14724864257824229282 |