Reactive sputtering of TiOxNy deposition by the IBSD system with different N containing gases
碩士 === 輔仁大學 === 物理學系 === 99 === Recently, nitrogen-doped titanium oxide (TiOxNy) thin films have been drawn lots of interests since it has a narrower bandgap compared to TiO2 such that the absorption light in it can be shifted to visible light region. However, it is still a controversial issue what...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/07777111837788297746 |