Development of TiO2-based complex pulse-sputtered thin films with long-duration superhydrophilicity
碩士 === 逢甲大學 === 材料科學所 === 99 === This dissertation employs pulsed-DC reactive (Ar/O2) magnetron sputtering deposition processes, in conjunction with in-situ monitors of (a) cathode voltage/current, and (b) partial oxygen pressure as a function of the value of oxygen flow rate under constant power. A...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/17770834182464927603 |