Status Analyses on Energy Conservation Technologies for High-Tech Fab of Taiwan
碩士 === 中原大學 === 電機工程研究所 === 99 === Abstract High-tech Fab energy use grand, a 12-inch Foundry Fab contract capacity of about 60 ~ 120 MW, a 8.5-generation TFT Fab contract capacity is about 100 ~ 150MW, equivalent to a small town with electricity, Fab facility, each machine processes 55%, 45% of the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/81491612322724595310 |