The Application of Neural Fuzzy Network in Temperature Control of Heater Block of ICP Etcher
碩士 === 中原大學 === 電機工程研究所 === 99 === In the semiconductor manufacturing process of etching, temperature control is a very important factor. The stability of the etching rate and quality of uniformity are related to accuracy of temperature control. In situation that there are some defects of deigni...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2011
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Online Access: | http://ndltd.ncl.edu.tw/handle/03958479419702582091 |