The Application of Neural Fuzzy Network in Temperature Control of Heater Block of ICP Etcher

碩士 === 中原大學 === 電機工程研究所 === 99 === In the semiconductor manufacturing process of etching, temperature control is a very important factor. The stability of the etching rate and quality of uniformity are related to accuracy of temperature control. In situation that there are some defects of deigni...

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Bibliographic Details
Main Authors: Jun-Tin Zhou, 周俊廷
Other Authors: none
Format: Others
Language:zh-TW
Published: 2011
Online Access:http://ndltd.ncl.edu.tw/handle/03958479419702582091