Analysis of wafer defects and improvement in semiconductor processing
碩士 === 中原大學 === 電子工程研究所 === 99 === In integrated circuit processing, the issue of wafer defects is very important for elevating the product yield. Wafer defects show an even stronger impact on the product yield as the circuit dimension shrinks. In semiconductor processing, the steps such as photolit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/15828861329711710829 |