Development of high-κ EuTixOy and LuTixOy sensing membranes using poly-N-isopropylacrylamide as a biomolecule encapsulation material for biosensor applications
碩士 === 長庚大學 === 電子工程學系 === 99 === In this thesis, europium titanium oxide and lutetium titanium oxide dielectric grown using reactive RF-sputtering were investigated as sensing membrane of pH-EIS structure. We found the optimum condition was that the annealing temperature was 900°С, it exhibited a l...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Published: |
2011
|
Online Access: | http://ndltd.ncl.edu.tw/handle/57630051272321456780 |