Physical Characterization and Electrical Properties of Sol-gel-derived Zirconium Dioxide Films
碩士 === 長庚大學 === 化工與材料工程學系 === 99 === In this thesis research, zirconium oxide (ZrO2) thin films were prepared by sol-gel method and the effects of the type of annealing heat treatment (conventional furnace annealing (CFA) and rapid thermal annealing (RTA)) employed and the post-annealing atmosphe...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Published: |
2011
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/75581250790913409073 |