The Studies of ZnO /Al2O3 Thin Film Growth and Properties of Mn-doped ZnO
碩士 === 國防大學理工學院 === 光電工程碩士班 === 99 === There are two parts in this thesis. The first part, ZnO/Al2O3 thin films were deposited on Si(111) wafer and ITO glass substrates. Al2O3 thin films were made by annealing Al metal deposited film under O2 gas at temperature between 850-500 0C. Vapor Phase Transp...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2011
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53234576754562582715 |