Numerical Experiment and Visualization of A Three-Dimensional Slot Coater for Photoresist: Coating Windows and Defects Analysis
碩士 === 元智大學 === 化學工程與材料科學學系 === 98 === ABSTRACT Slot die coating is a pre-metered coating method frequently used in industries such as integrated circuit (IC), printed circuit board (PCB), color filter or antireflective material coating in LCD. The aims of this study are two-fold, the construction...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51507503147568111771 |