Detection of Abnormal Machines in Multi-Stage Process via End-of-Line Measurements
碩士 === 元智大學 === 工業工程與管理學系 === 98 === Process with multi-stage is a trend for Wafer Fab Nowadays. It is important to find out the critical stage which may affect yield according to a judgment datum. To find out the critical stage, P-Value calculated by ANOVA is usually taken into consideration be...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02456706516678659162 |