Using e-beam evaporation to fabricate Al2O3 film on glass substrate for high frequency ZnO thin film SAW devices
碩士 === 大同大學 === 光電工程研究所 === 98 === Now communication elements are developing towards high frequency. SAW devices must have high velocity, high electromechanical coupling coefficient and low insertion loss. SAW devices composed of the piezoelectric thin film and different substrate materials or buffe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14957572528651641272 |