Fabrication of high frequency SAW devices with ZnO thin film on Al2O3/glass substrates by RF sputtering
碩士 === 大同大學 === 光電工程研究所 === 98 === Abstract Now communication elements are developing towards high frequency. SAW (Surface acoustic wave, SAW) devices must have high velocity, high electromechanical coupling coefficient and low insertion loss. SAW devices composed of the piezoelectric thin film and...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50620200062988798197 |