Fabrication of micro-structures on CVD diamond film by thermal reflow and RIE processes
碩士 === 淡江大學 === 機械與機電工程學系碩士班 === 98 === Diamond, having many advanced physical and mechanical properties,is one of the most important materials used in the mechanical,telecommunication and optoelectronic industry. In the present study,thermal reflow technique was employed to generate metal micro-m...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48251019271523473841 |