Unsteady Flow-Field Analysis of the Reticle Stocker in a Cleanroom with a Moving Crane
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 98 === Photo-masks play the essential role of photographic negative film in the manufacturing of microelectronics components such as chips, wafers, MEMS or LCD panels. To meet the increasing demand of photo-masks, it is necessary to maintain high production yiel...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/48vzvj |