Assessment of Energy-saving Strategies for Clean Rooms
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 98 === Cleanrooms in high-tech fabs are commonly applied to meet the stringent requirement of high cleanliness processing environment. Heating, ventilating, and air-conditioning (HVAC) system is therefore remarkably utilized to control the indoor temperature a...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
|
Online Access: | http://ndltd.ncl.edu.tw/handle/n64ccf |