Contamination Control for Wafers During Storage and Transport Processes
博士 === 國立臺北科技大學 === 機電科技研究所 === 98 === The issue of contamination control plays an important role in semiconductor manufacturing processes. This study evaluated the influences of micro-comtamination control on the transportation and purging performance in 450mm and 300mm-wafer front opening unified...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/tc2278 |