Fabrication of highly oriented c-axis AlN films and their application for UV photodetector
碩士 === 國立臺北科技大學 === 機電整合研究所 === 98 === Future missions for space astronomy, defense, science and technology required UV photodetector that possess high sensitivity, high precision, low power loss, and high thermal stability. Recently, aluminum nitride has attracted a worldwide attention for potentia...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/z2c4nv |