P-type amorphous carbon films prepared by radio frequency sputtering for the application of photovoltaic solar cells
碩士 === 國立臺北科技大學 === 材料科學與工程研究所 === 98 === A boron-doped amorphous carbon film was prepared by radio frequency (r.f.) magnetron sputtering method. The sputtering targets used were composed of boron pieces buried in a graphite disc. The boron-doped amorphous carbon films after annealed at 500 oC showe...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/p7h64g |