Study on preparation of surface textured Mo-doped zinc oxide thin films using single target sputtering
碩士 === 南台科技大學 === 光電工程系 === 98 === In this research, Molybdenum doped zinc oxide (MZO) films have been fabricated on glass substrates by r.f. magnetron sputtering. A sintered oxide target ZnO/MoO3 with a purity of 99.99% was used as the sputter source. The optoelectrical property of MZO films depend...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64270684827839401127 |