Study of Silicon-Germanium OxideNanostructure
碩士 === 南台科技大學 === 光電工程系 === 98 === In this study, SixGeyO1-x-y films are grown by radio-frequency reactive magnetron sputtering using SiGe (50:50 wt.%) target. We analyze effects of controllable parameters on the film structure and properties. Si, Ge and O contents are extracted by X-ray photoelectr...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61257226264875020806 |