A Study of Single EWMA Controllers with Metrology Delay
碩士 === 南台科技大學 === 工業管理研究所 === 98 === Exponentially Weighted Moving Average (EWMA) controller is a popular run to run (R2R) controller. Due to its simplicity and effectiveness for process monitoring and controlling, it is widely used in semiconductor manufacturing. In practice, the problem of metrolo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85388381457365111072 |