Photocatalystic analysis of titanium dioxide thin filmswith various manufactuning process
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Photo catalytic property analysis of titanium dioxide thin films deposited by sol-gel and sputtering is presented in this work. The sol-gel method includes spray and spin costing, while a 99.9％ titanium target is used in sputtering and the substrate is 3×3 c...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/00058684491669479857 |
| Summary: | 碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Photo catalytic property analysis of titanium dioxide thin films deposited by sol-gel and sputtering is presented in this work. The sol-gel method includes spray and spin costing, while a 99.9％ titanium target is used in sputtering and the substrate is 3×3 cm with 1.85 cm thickness corning glass. A series of photocatalytic property tests are conducted, including using negative ions detector to measure the negative ions produced by the thin films; using the 3-dimensional profiler to measure the roughness and thickness; using the contact angle meter to measure the contact angle; using spectrometer to test the transmittance of the methylene blue solution after decomposition by the thin films; and using volatile organic compound meter to measure the VOC decomposition. The air purified ability of the titanium dioxide thin films prepared by various processes is studied in the final.
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