Photocatalystic analysis of titanium dioxide thin filmswith various manufactuning process
碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Photo catalytic property analysis of titanium dioxide thin films deposited by sol-gel and sputtering is presented in this work. The sol-gel method includes spray and spin costing, while a 99.9% titanium target is used in sputtering and the substrate is 3×3 c...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2010
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Online Access: | http://ndltd.ncl.edu.tw/handle/00058684491669479857 |