Photocatalystic analysis of titanium dioxide thin filmswith various manufactuning process

碩士 === 聖約翰科技大學 === 自動化及機電整合研究所 === 98 === Photo catalytic property analysis of titanium dioxide thin films deposited by sol-gel and sputtering is presented in this work. The sol-gel method includes spray and spin costing, while a 99.9% titanium target is used in sputtering and the substrate is 3×3 c...

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Bibliographic Details
Main Authors: Huang,Chien Min, 黃健閔
Other Authors: 李再成
Format: Others
Language:zh-TW
Published: 2010
Online Access:http://ndltd.ncl.edu.tw/handle/00058684491669479857