Heat transfer modeling of excimer laser melting of amorphous silicon thin film
碩士 === 國立聯合大學 === 材料科學工程學系碩士班 === 98 === The excimer laser crystallization of amorphous silicon films is a commonly technique for fabricating poly-crystalline thin film transistors in low temperature. The grain growth in films is controlled by solidification time and melted depth during excimer...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/36884041498756471929 |