Research of the Closed-Loop Micro-/Nano-Z-Axis Positioning Stage Using the Real-Time Control System
碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === The objective of this research is to develop a NI cRIO based closed loop micro-/nano-positioning system for z-axis scanning. The developed system mainly consists of a piezoelectric actuator, a lever mechanism for displacement magnification, a micro-/nano-position...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50976878095658698564 |