Research on Thin Film Stress Characteristic and Effects of Cu-CMP Process Using X-Ray Measurement Technique
碩士 === 國立臺灣科技大學 === 機械工程系 === 98 === Thin film technology has been widely applied on IC, Opto-Electronics and related application due to the advantages of structure minimization and specific physical and chemical properties compared with traditional bulk materials. However, the performance of materi...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/49242569492917340003 |