DC Sputtering Homo- and Hetero-Epitaxy of Si and Ge Films
博士 === 國立臺灣科技大學 === 電子工程系 === 98 === Homo- and hetero-epitaxy of Si and Ge films were realized by using DC magnetron sputtering in this article. Si and Ge films have been homo- and hetero-epitaxially grown on Si substrates, and the Ge films also can be homoepitaxially grown on Ge substrates. The inf...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85534111717012966330 |