Technical Evaluation of Stress Release Structures for MEMS Acoustic Diaphragms
碩士 === 國立臺灣大學 === 機械工程學研究所 === 98 === Residual stress generated by the manufacturing process of MEMS microphones significantly deteriorates system performance. As a result, it is normal to use stress release structure (SRS) to reduce residual stress and improve microphone’s performance. Using...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53580980415884611720 |