Development of a Planar Laser Diffraction Encoder with High Alignment Tolerance
碩士 === 臺灣大學 === 機械工程學研究所 === 98 === Abstract Nowadays, many nano manufacturing and measuring systems depend on the metrology in the nanometer displacement. However, sensors with long measuring distance and nano-scale resolution are not only expensive, but easily affected by the unstable environment....
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2010
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60777388008524464042 |